Wafer-carrier Mounting Photomicrosensors
last update: September 24, 2012
| Appearance |
Sensing method |
Sensing distance |
Output configuration | Cable length | Model |
|---|---|---|---|---|---|
|
Reflective type | 0 to 3 mm (Infrared light) |
Turns ON when wafer carrier is present. |
2 m | EE-SPY801 2M |
|
EE-SPY802 2M |
| Item | Model |
|---|---|
| Pedestal | EE9-C01 |
| EE9-C02 |
Note: There are no sensor functions provided.
last update: September 24, 2012