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Advanced sensing technology
packed into the smallest Sensor Heads in this class
The three basics of
sensing-speed, sensitivity, and precision - have been balanced to meet
application needs with the best methods possible.
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ZS-LD200
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ZS-LD50/LD80
Stable Measurements for PCBs,
Black Resin, and Metal
All you need to do is select the proper
mode to achieve stable sensing of PCBs, resins, black rubber, and
other light-penetrating workpieces (which could not be easily handled
with previous reflective laser displacement meters).
• Just select High-precision Mode to
stably measure black rubber.
• Just select Penetration Mode to stably
measure PCBs or black resin.
Ideal Application
Examples for Each Distance Range
ZS-LD40T
The Only Way to Measure Glass
• Stably measure height and
undulations in transparent, coated, or colored glass on work tables
Menu let you easily set the measurement
conditions for a wide range of glass to achieve stable measurements.
• Stable detection at 40 mm with a
line beam of 2 mm
A 2-mm line beam reduces in influence of
the black and white pattern on granite work tables to achieve stable
measurements.
• Sensing Performance for Measurement
Stability and High-speed Response
Submicro resolution (0.25 µm) has been
achieved for moving measurements (8 ms) of glass and mirror-surface
wafers. (Actual Values)
ZS-LD20T
The Only Way to
High-precision Displacement Measurements
• Superior Features for Semiconductor
Wafer, Glass, and Other Measurements Requiring Precision
An unbelievable stationary measurement
precision of 0.01 µm (10 nm*), the highest in this product class.
* nm (nanometer) 10 -9 m
Ideal Application
Examples for Each Distance Range
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OMRON IA Global
